Metrology

NNF Staff Contacts : Jim Mitchell and Nicole Hedges

Dektak D150 Contact Profilometer

Tip Size : 12.5um Radius Inverted Cone

Samples : Pieces – 8″ Wafer

Step Height Range : 100A – 1mm

Stress Measurement : 2″ – 8″ Wafers:

Wyko NT9100 Optical Profilometer

White Light and Green Light Measurements

Samples : Pieces – 6″ Wafer

Surface Mapping and Characterization

Vase Ellipsometer

Multi-Angle Capable System

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Nanometrics

 

4-Pt Probe

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