For all academic users, NCSU and Non-NCSU users, and any Government Funded Industry customers there is a graduated cap in place per user per project per month with the following levels:
|Dollars spent at NNF (monthly)||Tool rate ($/hr)|
|$0 – $1250||$50.00|
|$1250 – $3000||$25.00|
If processing for academic users is performed by the NNF staff, an additional staff rate of $60/hour is charged for all processes and this charge is not capped. The same rate also applies to all consulting, troubleshooting or any other work involving the NNF staff. The staff rate is $115/hour for industrial projects.
Equipment training will incur cost for both tool usage time and staff time. The tool usage will contribute to the user’s monthly cap but the staff time is not limited. If more than one user can be trained at the same time the cost will be divided between the individual user projects.
NNF offers free processing to undergraduate students supporting a graduate student project. The graduate student must be an active user of the NNF to drive the project and make processing decisions. If the undergraduate student is working on an independent research project they will be billed at the normal NCSU student rate.
Onsite Academic/Government Funded Industry: Tool Rate = $50/Hr Staff Rate = $60/Hr
Non-NCSU Academic: Tool Rate = $50/Hr Staff Rate = $60/Hr
Privately Funded Industry: Tool Rate = $95/Hr Staff Rate = $115/Hr
Note: The cost of materials and supplies for all standard NNF processes is included in the user fees unless noted otherwise.
DC Sputter: All users will be charged a “precious metal fee” for special sputtering target materials such as Au and Pt. For industrial users (remote and on-site) this fee is $214.50/deposition run for up to 300nm thickness. For all academic users, the charge is $150.00/deposition run for up to 300nm thickness and this fee is not capped. Additional deposition over 300nm will be billed in 100nm increments, $71.50/deposition for industry users and $50/deposition for academic users.
Vapor Deposition – Ebeam and RH Evaporators: Users, who need precious metal evaporation (e.g. gold and platinum) in their fabrication processes regularly are expected to purchase their own metal pellets. We use 1/8 inch long, 1/8 inch diameter pellets of 99.99% purity. Users are also recommended to bring their own evaporation crucibles, which eliminates the need of removing the remaining metal from the NNF crucible. NNF will keep a limited supply of gold and platinum for occasional academic and industrial users. The charge for gold and platinum is based on the price the NNF paid for the material when purchased. The amount used is determined by weighing the crucible before and after evaporation.
LPCVD LTO: All academic users will be charged an additional materials fee of $154 per 100 nm of SiO2 and this fee is not included in the monthly cap.