Exposure calibration checks:

UV energy and uniformity is checked biweekly and adjusted if needed. 

We calibrate the lamp output to the i-line (365nm) channel. The i-line intensity is checked to be 10.0 +/- 0.2 mJ/s with a calibrated hand held meter and the power supply is adjusted if needed so the output is accurate. Uniformity is checked and adjusted if needed to be better than 5% across a 4″ area. 

*Note, this is a broadband exposure system. We only calibrate the i-line, but the other line intensities track accordingly. The total energy output is closer to 45mW/cm2 if adding all the relevant wavelengths.*  

System calibration checks:

Laser energy and system focus are checked monthly and adjusted if needed. 

This baseline process is calibrated for writing photo masks.  Commercially purchased, pre-coated blank mask plates are exposed using a dose and focus matrix.  The mask plate is then developed, etched and inspected to find the optimum energy and focus.  The smallest features are then measured to make sure they are accurate to better than 200nm of the targeted dimensions.

Contact staff for current calibration data.