User Rates

The NNF has separated the tool set into four different groups for usage rates.  The equipment split is as follows:

Based on these groupings the usage rate levels per customer type are as follows:

If processing is performed by the NNF staff, an additional staff rate is charged for all processes. The same rate also applies to all consulting, troubleshooting or any other work involving the NNF staff.

Equipment training will incur cost for both tool usage time and staff time. If more than one user can be trained at the same time the cost will be divided between the individual user projects.

Note: The cost of materials and supplies for all standard NNF processes is included in the user fees unless noted otherwise. 

Photo Masks: Photo mask plates will bill at a flat rate that includes the per plate price and the per storage box price at the time of purchase.

DC Sputter: All users will be charged a precious metal fee for sputtering gold and platinum. For industrial users (remote and on-site) this fee is $214.50/deposition run for up to 300nm thickness. For all academic users, the charge is $150.00/deposition run for up to 300nm thickness. Additional deposition over 300nm will be billed in 100nm increments, $71.50/deposition for industry users and $50/deposition for academic users.

Physical Vapor Deposition – Ebeam Evaporators: Users who need precious metal evaporation (e.g. gold, platinum, silver, and palladium) in their fabrication processes will be billed for precious metal consumed during deposition. The Thermionics Ebeam Evaporator gold usage will be billed based on the mass of material consumed at the price of the material when purchased. The CHA Ebeam Evaporator precious metals will be billed per 500A of deposition at 60% of the price of the material when purchased.